Optical 3D metrology enables fast, non-contact surface roughness measurement of defects and roughness for precise ...

Defect detection requirements on the order of 10 defective parts per million (DPPM) are driving improvements in inspection tools’ resolution and throughput at foundries and OSATs. However, defects ...

Ever since 17th century scientist Anton van Leeuwenhoek peered at microbes through a crude optical microscope, the quest for higher performance has been relentless. Just as Leeuwenhoek’s microscope ...

In the field of materials characterization, optical microscopy is one of the most commonly used imaging techniques. It is estimated that the diffraction limit of optical light is half of the ...

Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and ...

Diverse optical wafer defect inspection systems including (a) Brightfield/darkfield imaging system, (b) Dark-field imaging with null ellipsometry, (c) Through-focus scanning imaging microscopy, (d) ...

The techniques used in optical microscopy are important to ensure that a sample can be viewed as clearly as possible. This will provide information about its microscopic appearance. An optical ...