Algorithmic complexity, a cornerstone of theoretical computer science, examines the intrinsic resource requirements of computational problems and the limits of what can be efficiently computed. Within ...

Chebyshev polynomials, a central class of orthogonal polynomials, have long been pivotal in numerical analysis, approximation theory and the solution of differential equations. Their inherent ...

Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...