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In in-line PVD sputtering systems, substrates are linearly passed beneath one or more sputter cathodes to obtain their thin film coating. This motion is facilitated by loading the substrates onto a ...

Sputter coating in scanning electron microscopy is a sputter deposition process to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy.

The coating materials can be either molecules, including nitrides and oxides, or can be pure atomic elements such as both metals and non metals. There are various forms of thin film deposition ...