Via patterning at advanced nodes requires extremely low critical dimension (CD) values, typically below 30nm. Controlling these dimensions is a serious challenge, since there are many inherent sources ...
We first developed a virtual device structure to test how ALD thickness affects hole size uniformity and CD. We started our virtual experiment by using two crisscross SAQP processes and transferring a ...
Separator film is a critical component within a lithium-ion battery and ensuring a consistent thickness and homogenous distribution of the pores is key to optimizing battery performance and safety.
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