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Effects on InP surface trap states of in situ etching and phosphorus ...
Sep 15, 1987 · Interface properties were found to be critically dependent upon PCl 3 molar fraction, both the etching and deposition time, and the etching and deposition temperature.
Atomic density function theory and modeling of microstructure …
Jul 12, 2006 · In this theory, the evolution of the system is described not by the individual movement of each atom in the same system but by the evolution of the atomic density …